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Partnerships

Probing Solutions for Fast Wafer Tests.

Together with our partner bsw Testsystems & Consulting AG, we advise you on modular wafer probe systems from the manufacturer brands Semishare and Signatone. Each probe station is configured to customer specifications and matched to your individual measurement application with the parameter analyzer.

Would you like to learn more about using your parameter analyzer with a probe station? Please contact our experts.

Request a non-binding consultation now

What Is a Wafer Probe Station?

  • Precision for your wafer test: The probe station establishes high-precision mechanical contact with the unsingulated wafer and creates the electrical connection to your parameter analyzer. This stimulates the semiconductor device under test and measures its electrical characteristics.
  • Efficiency through specialization: The configuration of the probe station follows structured planning of each individual test step. This ensures that the wafer prober is precisely matched to your test requirements - for an optimal and cost-effective test process.
  • Three automation levels: Manual, semi-automatic or fully automatic - different operating modes of probe stations take individual quantities and specific measurement applications into account. The semi-automatic probe station provides a particular bridge, as it can be expanded into a fully automatic system and therefore also offers investment security as quantities increase.

Gain clarity about the electrical quality of your chips at an early stage and accelerate product development. If process deviations are detected quickly, scrap or rework can be avoided and failure costs reduced.

Complete Solution for Your Wafer Test.

Electrical measurements with a wafer probe station are performed using suitable measuring instruments. Parameter analyzers and curve tracers provide special integrated functions required for systematic semiconductor characterization. The parameter analyzer combines measurement functions such as IV, CV or pulse measurements as well as synchronized SMU channels in one system. The curve tracer focuses more strongly on displaying and evaluating IV characteristics. Both measuring instruments are used to visualize the behavior of components such as diodes, transistors or SiC/GaN power semiconductors.

As a BSW partner, we can provide you with a complete test solution for wafer characterization using probe stations. Together with a parameter analyzer or curve tracer from Keithley, Iwatsu and Keysight, you receive a highly efficient system for precisely contacting and measuring your device under test.


Parameter analyzers for use with a probe station.

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4200A-SCS
Keithley
4200A-SCS
Mainframe analyzer parameter
On Request
Delivery time upon request
CS-8500
Iwatsu
CS-8500
Curve Tracer 5000V, 8mA Main Frame, Fixture, Test Adaptors, (requires CC-8500 and ID-8500)
On Request
Delivery time upon request
B1500A
Keysight
B1500A
Semiconductor Device Analyzer Mainframe
€42,381.00
Delivery time upon request
B1506A
Keysight
B1506A
Power Device Analyzer for Circuit Design
€7,321.00
Delivery time upon request
CS-8200
Iwatsu
CS-8200
Curve Tracer 2000V, 20mA Main Frame, Fixture, Test Adaptors, (requires CC-8200 and ID-8200)
On Request
Delivery time upon request
CS-8020
Iwatsu
CS-8020
Curve Tracer 200V, 2A Main Frame, Fixture, Test Adaptors, (requires CC-8020 and ID-8020)
On Request
Delivery time upon request
PZ2100A
Keysight
PZ2100A
Precision Source/Measure Unit Mainframe (SMU), 4 slots, 1U
On Request
Delivery time upon request

The combination of probe station and parameter analyzer provides you with a complete solution for semiconductor characterization at wafer level.

Your dataTec Expert
for BSW Probe Stations.


Suman Kumar Mondal

Application Engineer

Request a non-binding consultation now

Typical Applications with the Wafer Prober.

Applications Examples
Wafer and component characterization WAT/CP test, DC/IV/CV characterization, tests on wafer diodes and transistors
Reliability and stress testing Aging and WLR test, high-voltage/high-current test
RF/mmW test 1/f noise test
MEMS and optoelectronics test/b> LD/LED/PD test (intensity and wavelength)
Material/failure analysis Evaluation of defects and process deviations
Special measurements Low-current test down to 100 fA

Key Technical Features.

The probe stations from Semishare and Signatone support precise on-wafer measurements from manual analysis to fully automated test sequences with high throughput. Depending on the model variant, the systems offer high positioning accuracy, stable chuck and motion platforms, and innovative imaging functions. Measuring instruments such as your parameter analyzer or curve tracer can be easily integrated. This enables a wide range of measurement tasks in research, development and production-related quality assurance to be implemented efficiently.

  • Modular platform design: The test systems can be expanded cost-effectively and adapted to new measurement tasks.
  • Precise positioning: Exact probe-wafer contact and high-precision motion resolution down to the µm range improve reproducibility and measurement reliability, especially for small structures.
  • Stable chuck and motion platforms: Safe and convenient contacting without mechanical drift, with vibration damping and pneumatic chuck technology for fast and precise X/Y movement depending on the model.
  • Innovative imaging support: Precise alignment and visual inspection of the test structures, including through high-resolution camera technology and microscope options.
  • Versatile test and special applications: Comprehensive characterization of semiconductor components, also under more stringent conditions (e.g., vacuum, high/low temperature), optional shielding system against EMI/spectral noise/stray light.

How Does the Probe Station Work with a Parameter Analyzer?

Probe Station:
Contacting the Wafer

1. The wafer is placed on the chuck of the probe station.

2. The wafer is aligned using the microscope, camera and positioning system.

3. The probes are lowered onto the device under test. Stable contact force with low contact resistance and reproducible positioning are decisive.

4. The parameter analyzer is connected to the probes via measurement cables.

Parameter Analyzer:
Measurement of the electrical characteristics

5. The analyzer applies defined voltages and currents, measures the electrical response of the device under test and generates IV/CV characteristics.

6. In semi-automatic or fully automatic systems, the probe station automatically moves to the next test structure. The measured values are stored for wafer evaluation.

7. The data show, among other things, process deviations, defective dies, edge-zone effects, outliers or systematic manufacturing problems.

Would you like to learn more about wafer probe stations for your application?
As a partner of BSW, we are available for a consultation.

Request a non-binding consultation now

About SEMISHARE.

SEMISHARE is a leading manufacturer of modular wafer probe systems for individual test requirements in the semiconductor industry. Its main applications include WAT/CP tests (wafer and circuit tests), RF/mmW tests, I-V/C-V tests, and MEMS and optoelectronic component tests. Headquartered in China, the company has an international orientation and works with distributors such as BSW.

About Signatone.

Signatone is a US-based manufacturer of manual and semi-automatic wafer probe systems for flexible test applications in the semiconductor industry. Typical application areas include on-wafer probing, component characterization, and material and failure analysis in the semiconductor industry. Headquartered in California, the company has an international orientation and works with distributors such as BSW.